事业范围

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事业范围

真空事业部

FPD

真空事业部

10.5G OLED TV_LOADLOCK ASS'Y

8G OLED M_LOADLOCK ASS'Y

6G DRY ETCHER_TM

10.5G OLED TV_真空物流 TM

5.5G OLED M_ORGANIC CHAMBER

6G OLED M_METAL CHAMBER

6G OLED M_FURNACE CHAMBER

GLOVE BOX

11G PECVD_INLINE TM ASS'Y (国策)

11G PECVD_LL ASS'Y (国策)

8G OLED M_ITO/IGZO SPT CHAMBER

LASER ETCHER

LASER ETCHER

工业用 ROLL COATER

10.5G IGZO SPT_ROTATION CHAMBER

8G PECVD_PROCESS CHAMBER (AL)

R2R SPT_PROCESS CHAMBER